Share Email Print
cover

Proceedings Paper

Study on optical fabrication and metrology of precise convex aspheric mirror
Author(s): Huijun Wang; Jin Xu; Peng Wang; Ang Li; Wen Guo; Yan Du
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Optical fabrication and metrology technologies are studied in the paper to improve the accuracy of surface figure of a convex aspheric mirror. First, the main specifications of a convex aspheric mirror which is chosen to be the secondary mirror of an optical system are presented. The aperture of the mirror is 400mm. The mirror is made of ultra-low expansion (ULE) glass with honeycomb sandwich structure to get the ideal lightweight requirement. Then the mirror is surfaced by ultrasonic grinding, smart robot lapping and smart robot polishing processes relatively. Large-apertured tool is applied to reduce the mid-frequency surface error. Both the contour measuring method in the grinding and lapping stage and the measuring method with meniscus lens and its calibration mirror in the polishing stage are studied. The final surface figure of the mirror is that the root mean-square value (RMS value) is 0.016λ (λ=632.8nm), which meets the requirement of the optical system. The results show that the forging surfacing processes and measuring methods are accurate and efficient to fabricate the convex aspheric mirror and can be applied in optical fabrication for larger-apertured convex aspheric mirrors.

Paper Details

Date Published: 28 October 2016
PDF: 7 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830M (28 October 2016); doi: 10.1117/12.2242636
Show Author Affiliations
Huijun Wang, Beijing Institute of Space Mechanics and Electricity (China)
Jin Xu, Beijing Institute of Space Mechanics and Electricity (China)
Peng Wang, Beijing Institute of Space Mechanics and Electricity (China)
Ang Li, Beijing Institute of Space Mechanics and Electricity (China)
Wen Guo, Beijing Institute of Space Mechanics and Electricity (China)
Yan Du, Beijing Institute of Space Mechanics and Electricity (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

© SPIE. Terms of Use
Back to Top