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Proceedings Paper

Theoretical distribution of the structural uniformity of the vapor-deposited thin films
Author(s): Wei Zhang; G. Q. Chang
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Paper Abstract

According to the tangent rule, which relates the deposition angle to the growth direction of the columns, which comprise many vapor-deposited thin films, and according to the relative geometric and trigonometric relations between the evaporation source and the substrate, the theoretical distribution formulas describing the uniformity of the colunmar structure are given for four kinds of general fixtures. These distributions have been computed for various conditions. We also analyze and discuss a structural thin-film model, and have concluded that the structure obtained with the rotary spherical fixture is the best of several fixture alternatives.

Paper Details

Date Published: 1 December 1990
PDF: 6 pages
Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22426
Show Author Affiliations
Wei Zhang, Harbin Institute of Technology (China)
G. Q. Chang, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 1324:
Modeling of Optical Thin Films II
Michael Ray Jacobson, Editor(s)

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