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Proceedings Paper

Beam profile of gated field emitters
Author(s): Puroby M. Phillips; Kevin L. Jensen; E. G. Zaidman; C. Hor; Lex Malsawma
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Paper Abstract

Vacuum microelectronics is an emerging technology which relies heavily on solid state microfabrication techniques and the phenomenon of field emission. A whole new class of high frequency devices may become available by combining state-of-the-art fabrication techniques with the superiority of vacuum as a transport medium for electrons. An experiment has been designed to enhance understanding of stable operation of single tips as well as multiple arrays of field emitters and to provide correlation with theory and simulation. The quality of performance of an electron gun has two major factors: energy distribution, and the intensity of the electron beam. The energy distribution is to be measured by manipulating a microfabricated detector within an UHV environment. The detector is in the form of a Faraday cup with multiple apertures. The location of the detector is determined via laser interferometry.

Paper Details

Date Published: 13 October 1995
PDF: 12 pages
Proc. SPIE 2558, Millimeter and Submillimeter Waves II, (13 October 1995); doi: 10.1117/12.224257
Show Author Affiliations
Puroby M. Phillips, Naval Research Lab. (United States)
Kevin L. Jensen, Naval Research Lab. (United States)
E. G. Zaidman, Naval Research Lab. (United States)
C. Hor, Naval Research Lab. (United States)
Lex Malsawma, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 2558:
Millimeter and Submillimeter Waves II
Mohammed N. Afsar, Editor(s)

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