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Proceedings Paper

Detection of terahertz radiation using improved uncooled focal plane array detector
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Paper Abstract

A terahertz (THz) microbolometer detector and corresponding real-time imaging system were introduced in this paper. A 10nm NiCr thin film was integrated in the micro-bridge structure as the THz absorption layer by magnetron sputtering and reactive ion etching (RIE), and its improvement of THz absorption was verified by optical characteristics test. Through complicated semiconductor process, a microbolometer detector of 320×240 THz focal plane array (FPA) was prepared. And a real-time imaging system was established to identify the perfomance of this detector. The results demonstrated that the detector could get conscious THz image using a 2.52 THz far-infrared gas laser as THz radiation source.

Paper Details

Date Published: 25 October 2016
PDF: 5 pages
Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 96861J (25 October 2016); doi: 10.1117/12.2242405
Show Author Affiliations
Xing Zheng, Univ. of Electronic Science and Technology of China (China)
Zhiming Wu, Univ. of Electronic Science and Technology of China (China)
Jun Gou, Univ. of Electronic Science and Technology of China (China)
ZhiQing Liang, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 9686:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

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