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Proceedings Paper

Optical properties of thermally evaporated ultra-thin Al, Ag and Cu films
Author(s): Ming Zhou; Yaopeng Li; Sheng Zhou; Li Zhang; Yuan Cai; Dingquan Liu
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Paper Abstract

In this article, ultra-thin Al, Ag, Cu thin films with thickness d ~10nm are prepared by thermal evaporation, Ellipsometer and Spectrophotometer are used to measure Ψ, ∆, R and T of samples. Based on the characteristics of different metal materials, we choose proper physical model to analysis the dielectric function. Experimental results show that the method of Ellipsometer with transmittance data fitting can describe optical constants of ultra-thin metal films, and all the parameters of Ψ, ∆ and T show a good fitting result. Moreover, the reflection of samples simulated by MathCAD software using Fresnel coefficient equations also follows the measured reflectance data.

Paper Details

Date Published: 25 October 2016
PDF: 5 pages
Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 96860M (25 October 2016); doi: 10.1117/12.2242251
Show Author Affiliations
Ming Zhou, Shanghai Institute of Technical Physics (China)
Yaopeng Li, Shanghai Institute of Technical Physics (China)
Sheng Zhou, Shanghai Institute of Technical Physics (China)
Li Zhang, Shanghai Institute of Technical Physics (China)
Yuan Cai, Shanghai Institute of Technical Physics (China)
Dingquan Liu, Shanghai Institute of Technical Physics (China)
ShanghaiTech Univ. (China)


Published in SPIE Proceedings Vol. 9686:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

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