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Proceedings Paper

A novel method about online monitoring surface shape of optical elements in continuous polishing
Author(s): Jin Yin; Jianqiang Zhu; Xiang Jiao; Yongzhong Wu
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Paper Abstract

In conventional continuous polishing process, the surface shape of work-piece was measured by an optical plane template after being placed in such environment with constant temperature for 1 to 2 hours. During this period, uncertain influence may occur on the polishing pad due to the change of system state. Meanwhile, the regular off-line testing may cause re-processing. In this paper, a new method about on-line monitoring surface shape of optical elements is proposed by the theory of run sphere, and the change in curvature radius of the work-piece which lead to its radial tilt angle change. The change in work-piece surface shape indirectly obtain by the correction plate small angle with respect to the horizontal, and the angle were detected on line by the high-precision goniometer with the resolution 0.04 ''. According to theoretical calculations, the diameter of 200mm precision work-piece PV value up to 0.02λ (λ = 632.8nm). The fused quartz glass was measured by above method. The test results showed that the surface accuracy and processing efficiency were significantly promoted, and also improving the controllability of surface shape of work-piece based on this method.

Paper Details

Date Published: 28 October 2016
PDF: 7 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831L (28 October 2016); doi: 10.1117/12.2242247
Show Author Affiliations
Jin Yin, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Jianqiang Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Xiang Jiao, Shanghai Institute of Optics and Fine Mechanics (China)
Yongzhong Wu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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