Share Email Print
cover

Proceedings Paper

Laser ablation method for production of surface acoustic wave sensors
Author(s): Dmitry Lukyanov; Sergey Shevchenko; Alexander Kukaev; Daniil Safronov
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Nowadays surface acoustic wave (SAW) sensors are produced using a photolithography method. In case of inertial sensors it suffers several disadvantages, such as difficulty in matching topologies produced on opposite sides of the wafer, expensive in small series production, not allowing further topology correction. In this case a laser ablation method seems promising. Details of a proposed technique are described in the paper along with results of its experimental test and discussion.

Paper Details

Date Published: 21 October 2016
PDF: 5 pages
Proc. SPIE 9986, Unmanned/Unattended Sensors and Sensor Networks XII, 99860G (21 October 2016); doi: 10.1117/12.2242005
Show Author Affiliations
Dmitry Lukyanov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Sergey Shevchenko, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Alexander Kukaev, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Daniil Safronov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)


Published in SPIE Proceedings Vol. 9986:
Unmanned/Unattended Sensors and Sensor Networks XII
Edward M. Carapezza; Panos G. Datskos; Christos Tsamis, Editor(s)

© SPIE. Terms of Use
Back to Top