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Proceedings Paper

Computer-optimized optical monitoring wavelengths
Author(s): Ricardo Flores-Hernandez
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Paper Abstract

Experimental and computer procedures are described to calculate in advance the optimal monitoring wave lengths for each layer for any all-dielectric multilayer stack on any substrate holder configuration. Thickness ratios [tooling factors] between monitoring and working substrates are obtained experimentally to compute the spectral behavior of the irregular stack that has to be deposited on the monitoring substrate to obtain the desired, correct all-dielectric thin film stack on the working substrates. The computational algorithm takes into account the overall monitoring beam's spectral response. The results obtained are a set of possible turning-point monitoring wave lengths for each layer to be deposited and plots the transmittance or reflectance behavior of these wave lengths as a function of layer thickness growth, to allow the user to select the most convenient among them.

Paper Details

Date Published: 1 December 1990
PDF: 5 pages
Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22417
Show Author Affiliations
Ricardo Flores-Hernandez, Ctr. de Investigaciones en Optica (Mexico)


Published in SPIE Proceedings Vol. 1324:
Modeling of Optical Thin Films II
Michael Ray Jacobson, Editor(s)

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