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Proceedings Paper

Vacuum system for applying reflective coatings on large-size optical components using the method of magnetron sputtering
Author(s): Alexander A. Azerbaev; Magomed A. Abdulkadyrov; Sergey P. Belousov; Aleksandr N. Ignatov; Timur R. Mukhammedzyanov
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Paper Abstract

Vacuum system for reflective coatings deposition on large-size optical components up to 4.0 m diameter using the method of magnetron sputtering was built at JSC LZOS. The technological process for deposition of reflective Al coating with protective SiO2 layer was designed and approved. After climatic tests the lifetime of such coating was estimated as 30 years. Uniformity of coating thickness ±5% was achieved on maximum diameter 4.0 m.

Paper Details

Date Published: 28 October 2016
PDF: 10 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968307 (28 October 2016); doi: 10.1117/12.2241517
Show Author Affiliations
Alexander A. Azerbaev, JSC Lytkarino Optical Glass Factory (Russian Federation)
Magomed A. Abdulkadyrov, JSC Lytkarino Optical Glass Factory (Russian Federation)
Sergey P. Belousov, JSC Lytkarino Optical Glass Factory (Russian Federation)
Aleksandr N. Ignatov, JSC Lytkarino Optical Glass Factory (Russian Federation)
Timur R. Mukhammedzyanov, JSC Lytkarino Optical Glass Factory (Russian Federation)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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