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Proceedings Paper

Mount-induced transmitted wavefront distortion measurement of large slab matrix module
Author(s): Haixian Ye; Tingfen Cao; Changchun Liu; Zhao Xiong; Haiping Chen
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Paper Abstract

We present a transmitted wavefront measuring system of large optic modules based on Shack Hartmann wavefront sensor, aiming to perform optical metrology for rectangular laser slabs arranged in a 4-high by 1-wide matrix. This system is developed to perform high-accuracy measurement for extremely high quality optical components needed for inertial confinement fusion (ICF) facility with wavefront accuracy better than 0.4λ (peak to valley, λ=632.8nm). Sensitivity analysis is put forward to specified tolerances of components to ensure the built system will perform as desired. Experiments results showed that added wavefront of each slab of 32 matrix modules is controlled under 1λ successfully.

Paper Details

Date Published: 27 September 2016
PDF: 5 pages
Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 968402 (27 September 2016); doi: 10.1117/12.2241504
Show Author Affiliations
Haixian Ye, China Academy of Engineering Physics (China)
Tingfen Cao, China Academy of Engineering Physics (China)
Changchun Liu, China Academy of Engineering Physics (China)
Zhao Xiong, China Academy of Engineering Physics (China)
Haiping Chen, China Academy of Engineering Physics (China)


Published in SPIE Proceedings Vol. 9684:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Yudong Zhang; Fan Wu; Ming Xu; Sandy To, Editor(s)

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