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Proceedings Paper

A deformable plane-parallel optical plate with 16 actuated points for low order aberrations correction
Author(s): Min Zhang; Lei Zhao; Lijian Dong; Yongxin Sui; Huaijiang Yang
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Paper Abstract

Since the microlithography with high number aperture(NA) projection objectives requires the correction of thermal lens aberrations, a deformable plane-parallel optical plate with continuous facesheet, 16 discrete actuators has been designed from the elasticity theory. Both axial forces and tangential bending moments are applied to the discrete position outside the clear aperture. The deformable plate needs to meet the condition that each actuator can generate a positive or a negative axial force. The deformable plate has been simulated by finite element modeling (FEM), the results show that the difference between the simulation force and the theory force is always less than 0.064N when the deformation is one of Z4-8 low order Zernike modes with 100nm coefficient, the axial forces are minor and the fitting errors of the aberrations are less than 5%.

Paper Details

Date Published: 25 October 2016
PDF: 8 pages
Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968605 (25 October 2016); doi: 10.1117/12.2241405
Show Author Affiliations
Min Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Lei Zhao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Lijian Dong, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Yongxin Sui, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Huaijiang Yang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 9686:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

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