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Proceedings Paper

Effect of incident deposition angle on optical properties and surface roughness of TiO2 thin films
Author(s): Yongqiang Pan; Chen Yang
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Paper Abstract

Optical properties, surface roughness and packing density of TiO2 thin films are studied by obliquely deposited on K9 glass by electron beam evaporation. The surface roughness of TiO2 thin films with different incident deposition angle is compared. The experimental results show that the transmittance increases and transmittance peak shifts to short wavelength with increasing incident deposition angle, the packing density of TiO2 thin films decrease from 0.80 to 0.34 with incident deposition angle increasing from 0° to 75°. The surface roughness of TiO2 thin films increase with increasing incident deposition angle. The surface roughness of TiO2 thin films is slightly bigger than the surface roughness of K9 substrate when the incident deposition angle is 75°. When the incident deposition angle is constant, TiO2 thin films surface roughness decrease with increase of film thickness.

Paper Details

Date Published: 28 October 2016
PDF: 6 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830U (28 October 2016); doi: 10.1117/12.2240559
Show Author Affiliations
Yongqiang Pan, Xi'an Technological Univ. (China)
Chen Yang, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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