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Proceedings Paper

Some physical properties and microstructure of titania films doped with multielement
Author(s): Longsheng Qian; Tongqun Miao; Youxin Yuan; Nai-Hong Wang
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Paper Abstract

The chemical composition, refractive index, texture thermal stability and microstructure of the films, by evaporating T102 mixed with elements of TaO5, YO3, and Mo , at the substrates with temperature of room, 180°c and 250° c, were investigated. The results showed that chemical composition of the films is different corresponding to not only that of materials and substrate temperature but also the manufacturing device. Both thermal stability with respect to crystalline temperature and rnicrostructure were different due to both the substrate temperature and chemical composition of the films/or coating materials.

Paper Details

Date Published: 1 December 1990
PDF: 10 pages
Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22405
Show Author Affiliations
Longsheng Qian, Changchun Institute of Optics and Fine Mechanics (China)
Tongqun Miao, Changchun Institute of Optics and Fine Mechanics (China)
Youxin Yuan, Changchun Institute of Optics and Fine Mechanics (China)
Nai-Hong Wang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1323:
Optical Thin Films III: New Developments
Richard Ian Seddon, Editor(s)

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