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Proceedings Paper

Automated precision reflectometer for first-surface mirrors I: optical head
Author(s): Erik W. Anthon; Luis F. Villanueva; Craig Van Horn; Richard Ian Seddon
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Paper Abstract

Multilayer-overcoated, high-reflector mirrors in sizes up to 30" x 50" areproduced on a continuous coating line. A fully-automatic, highly-accurate scanning reflectometer has been built as part of the process-control system for the continuous coating line. The reflectometer covers a spectral range of 380 to 800 nm and a range of incidence angles of 15° to 6O. The s- and the p-polariation components of reflectance are scanned separately. The reflectance measurements are absolute and are not referenced to a calibrated standard reflector. The absolute measurement accuracy is This paper describes the optical system used in the reflectometer.

Paper Details

Date Published: 1 December 1990
PDF: 9 pages
Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22403
Show Author Affiliations
Erik W. Anthon, Optical Coating Lab., Inc. (United States)
Luis F. Villanueva, Optical Coating Lab., Inc. (United States)
Craig Van Horn, Optical Coating Lab., Inc. (United States)
Richard Ian Seddon, Optical Coating Lab., Inc. (United States)

Published in SPIE Proceedings Vol. 1323:
Optical Thin Films III: New Developments
Richard Ian Seddon, Editor(s)

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