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Proceedings Paper

A 3D translation stage calibrated with Michelson interferometers
Author(s): Hui-Hung Lin; Kuo-Kai Hung; Lu-Yu Wang; Wei-Hung Su
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Paper Abstract

A 3D translation stage which meets the requirement of the next-generation lithography is proposed. The Michelson interferometer is used to evaluate the moving distance for this 3-dimensional translation stage. With the help of Michelson interferometer, accuracy in the order of nanometers is desirable.

Paper Details

Date Published: 7 September 2016
PDF: 6 pages
Proc. SPIE 9958, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X, 99581A (7 September 2016); doi: 10.1117/12.2240068
Show Author Affiliations
Hui-Hung Lin, Noporvis Co., Ltd. (Taiwan)
Kuo-Kai Hung, Noporvis Co., Ltd. (Taiwan)
Lu-Yu Wang, Noporvis Co., Ltd. (Taiwan)
Wei-Hung Su, National Sun Yat-Sen Univ. (Taiwan)


Published in SPIE Proceedings Vol. 9958:
Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X
Shizhuo Yin; Ruyan Guo, Editor(s)

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