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Proceedings Paper

Ion-beam-sputtered metal fluorides
Author(s): Thomas H. Allen; John Philip Lehan; Larry C. McIntyre
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Paper Abstract

Dense, water-free magnesium and calcium fluoride films were produced by Reactive Ion Beam Sputtering (RIBS). These films were found to J.e fluorine deficient because of a preferential sputtering of fluorine at the target This deficiency was eliminated by the addition of a fluorinecontaining gas (carbon tetrafluoride) to the coating chamber gases during deposition of the films. The chemical composition and density of the films were measured with Rutherford backscattering spectrometry. The relationship between film composition and optical properties was investigated. The results indicate that the fluorine deficiency can be eliminated without compromising either the density or environmental durability.

Paper Details

Date Published: 1 December 1990
PDF: 14 pages
Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22399
Show Author Affiliations
Thomas H. Allen, Optical Coating Lab., Inc. (United States)
John Philip Lehan, Optical Coating Lab., Inc. (United States)
Larry C. McIntyre, Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 1323:
Optical Thin Films III: New Developments
Richard Ian Seddon, Editor(s)

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