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Proceedings Paper

Ion-assisted coating for large-scale Bimorph deformable mirror
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Paper Abstract

We have fabricated a 410 x 468 mm size deformable mirror with 100 Bimorph piezoceramic actuators for the LFEX laser system at Osaka University. In the case of Bimorph-type deformable mirrors, the mirror surface had to be polished and coated after bonding the piezoceramic actuators to the rear side of the thin mirror substrate. This provides a good surface figure, but the coating temperature for the high-reflection mirror was strictly limited because of the thermal fragility of piezoceramic actuators. The mirror substrate with the actuators was polished, and an ion-assisted multilayer dielectric coating was produced at 60 degrees Celsius with our 80-inch coating chamber. The flatness of the mirror just after coating was 7 μm, and reduced by aging to 3.2 μm when the mirror was assembled. The surface figure of the assembled mirror with 20 piezostack bonded actuators is demonstrated and a laser-induced damage threshold tested with a witness sample is also reported.

Paper Details

Date Published: 22 July 2016
PDF: 6 pages
Proc. SPIE 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers, 99830B (22 July 2016); doi: 10.1117/12.2239479
Show Author Affiliations
Takuya Mikami, Okamoto Optics Works, Inc. (Japan)
Takayuki Okamoto, Okamoto Optics Works, Inc. (Japan)
Kunio Yoshida, Okamoto Optics Works, Inc. (Japan)
Takahisa Jitsuno, Osaka Univ. (Japan)
Shinji Motokoshi, Institute for Laser Technology (Japan)
Vadim V. Samarkin, Active Optics NightN Ltd. (Russian Federation)
Alexis V. Kudryashov, Moscow State Univ. of Mechanical Engineering (Russian Federation)
Junji Kawanaka, Osaka Univ. (Japan)
Noriaki Miyanaga, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 9983:
Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers
Takahisa Jitsuno; Jianda Shao; Wolfgang Rudolph, Editor(s)

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