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Proceedings Paper

Development of a long trace profiler at SPring-8 using a newly developed slope sensor
Author(s): Y. Senba; H. Kishimoto; T. Miura; H. Ohashi
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Paper Abstract

The long trace profiler (LTP) at SPring-8 has been upgraded using a newly developed laser-based slope sensor for precise measurements with high spatial resolution. Simulations of centroid calculation in the slope sensor have been performed to evaluate the ultimate accuracy of slope measurement. A performance test of the LTP has also been performed, and a spatial resolution of 0.6 mm has been confirmed.

Paper Details

Date Published: 8 September 2016
PDF: 6 pages
Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996204 (8 September 2016); doi: 10.1117/12.2239394
Show Author Affiliations
Y. Senba, Japan Synchrotron Radiation Research Institute (Japan)
H. Kishimoto, Japan Synchrotron Radiation Research Institute (Japan)
T. Miura, Japan Synchrotron Radiation Research Institute (Japan)
H. Ohashi, Japan Synchrotron Radiation Research Institute (Japan)


Published in SPIE Proceedings Vol. 9962:
Advances in Metrology for X-Ray and EUV Optics VI
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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Development of a long trace profiler at SPring-8 using a newly developed slope sensor



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