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Proceedings Paper

Nanoscale Si3N4 tuning fork cavity optomechanical sensors with high fmQm product
Author(s): Rui Zhang; Yundong Ren; Kartik Srinivasan; Vladimir Aksyuk; Marcelo Davanço; Yuxiang Liu
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Paper Abstract

There exists a tradeoff between the mechanical resonant frequency (fm) and the mechanical quality factor (Qm) of a nanomechanical transducer, which resulted in a tradeoff between the band width and sensitivity. Here, we present monolithic silicon nitride (Si3N4) cavity optomechanical transducer, in which high fm and Qm are achieved simultaneously. A nanoscale tuning fork mechanical resonator is near-field coupled with a microdisk optical resonator, allowing the displacement of mechanical resonator to be optically read out. Compared with a single beam with same length, width, and thickness, the tuning fork simultaneously increases fm and Qm by up to 1.4 and 12 times, respectively. A design enabled, on-chip stress tuning method is also demonstrated. By engineering the clamp design, we increased the stress in the tuning fork by 3 times that of the Si3N4 film. A fundamental mechanical in-plane squeezing mode with fm ≈ 29 MHz and Qm ≈ 2.2×105 is experimentally achieved in a high-stress tuning fork device, corresponding to a fmQm product of 6.35×1012 Hz. The tuning fork cavity optomechanical sensors may find applications where both temporal resolution and sensitivity are important such as atomic force microscopy.

Paper Details

Date Published: 16 September 2016
PDF: 6 pages
Proc. SPIE 9922, Optical Trapping and Optical Micromanipulation XIII, 99222X (16 September 2016); doi: 10.1117/12.2239197
Show Author Affiliations
Rui Zhang, Worcester Polytechnic Institute (United States)
Yundong Ren, Worcester Polytechnic Institute (United States)
Kartik Srinivasan, National Institute of Standards and Technology (United States)
Vladimir Aksyuk, National Institute of Standards and Technology (United States)
Marcelo Davanço, National Institute of Standards and Technology (United States)
Yuxiang Liu, Worcester Polytechnic Institute (United States)

Published in SPIE Proceedings Vol. 9922:
Optical Trapping and Optical Micromanipulation XIII
Kishan Dholakia; Gabriel C. Spalding, Editor(s)

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