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Proceedings Paper

Effects of ion bombardment on silver/dielectric interfaces with ion assisted e-beam evaporation
Author(s): David M. Fryauf; Juan J. Diaz Leon; Andrew C. Phillips; Nobuhiko P. Kobayashi
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Paper Abstract

Silver thin films were deposited by electron beam evaporation for application as telescope mirrors using a custom PVD chamber from the University of California Observatories Astronomical Coatings Lab. The silver (Ag) surface has been bombarded with different ion conditions prior to and during deposition of subsequent dielectric protective barrier layers by ion assisted electron beam evaporation. Ion source gases including nitrogen and argon are used, and dielectric barrier stacks utilizing silicon nitride and titanium dioxide are deposited onto Ag. We report the effects on mirror stack reflectivity spectra caused by ion bombardment parameters with different gases and different holding-time in vacuum prior to ion bombardment. We suggest that evolving Ag surface morphology and surface plasmon resonance coupling contribute to the changing optical properties of the mirror stack.

Paper Details

Date Published: 26 October 2016
PDF: 7 pages
Proc. SPIE 9924, Low-Dimensional Materials and Devices 2016, 99240M (26 October 2016); doi: 10.1117/12.2238741
Show Author Affiliations
David M. Fryauf, Univ. of California, Santa Cruz (United States)
Juan J. Diaz Leon, Univ. of California, Santa Cruz (United States)
Andrew C. Phillips, Univ. of California Observatories (United States)
Nobuhiko P. Kobayashi, Univ. of California, Santa Cruz (United States)

Published in SPIE Proceedings Vol. 9924:
Low-Dimensional Materials and Devices 2016
Nobuhiko P. Kobayashi; A. Alec Talin; M. Saif Islam; Albert V. Davydov, Editor(s)

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