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Proceedings Paper

Ion-assisted evaporation of vanadium dioxide thin films
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Paper Abstract

Vanadium dioxide (VO2) is a polycrystalline thin film that reversibly changes from a semiconductor to a metallic state at 68°C, and has important applications in thermal detection and actuation as well as in reconfigurable photonic circuitry. In this work, we have produced VO2 thin films by oxygen ion-assisted electron-beam evaporation. Compared to prior work, the phase change temperature is as low as 54°C, which we believe arise due to the oxygen implantation from the ion-assisted process. The films were deposited on c-cut sapphire substrates, and their properties were measured using a four-point probe electrical sheet resistance measurement.

Paper Details

Date Published: 15 September 2016
PDF: 5 pages
Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 99271Q (15 September 2016); doi: 10.1117/12.2238491
Show Author Affiliations
Mengyang Zou, Univ. of Dayton (United States)
Chuan Ni, Univ. of Dayton (United States)
Andrew Sarangan, Univ. of Dayton (United States)


Published in SPIE Proceedings Vol. 9927:
Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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