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Low noise torsional mechanical resonator for 12µm microbolometers
Author(s): L. Laurent; J. J. Yon; J. S. Moulet; P. Imperinetti; L. Duraffourg
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Paper Abstract

A new type of low noise uncooled microbolometer has been designed and fabricated. The sensor uses the low-noise properties of mechanical resonators (NEMS). As the temperature increases due to infrared absorption, the torsional Young’s modulus of mechanical parts decreases, modifying thereby the resonance frequency. Residual strains change also due to thermal expansion of layers, contributing also to the temperature coefficient of frequency (TCF). We compared the performances of various devices designed with different thermal isolation to identify the best devices for infrared detection and to assess the theoretical performance of such sensors. Results from FEM simulations of TCF for different designs are finally provided and confronted to experimental data.

Paper Details

Date Published: 19 September 2016
PDF: 9 pages
Proc. SPIE 9974, Infrared Sensors, Devices, and Applications VI, 997407 (19 September 2016); doi: 10.1117/12.2237916
Show Author Affiliations
L. Laurent, Univ. Grenoble Alpes (France)
CEA-LETI (France)
J. J. Yon, Univ. Grenoble Alpes (France)
CEA, LETI (France)
J. S. Moulet, Univ. Grenoble Alpes (France)
CEA-LETI (France)
P. Imperinetti, Univ. Grenoble Alpes (France)
CEA, LETI (France)
L. Duraffourg, Univ. Grenoble Alpes (France)
CEA, LETI (France)

Published in SPIE Proceedings Vol. 9974:
Infrared Sensors, Devices, and Applications VI
Paul D. LeVan; Ashok K. Sood; Priyalal Wijewarnasuriya; Arvind I. D'Souza, Editor(s)

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