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Quantitative characterization of aberrations in x-ray optics
Author(s): Frank Seiboth; Maik Kahnt; Maria Scholz; Martin Seyrich; Felix Wittwer; Jan Garrevoet; Gerald Falkenberg; Andreas Schropp; Christian G. Schroer
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Paper Abstract

Due to the weak interaction of X-rays with matter and their small wavelength on the atomic scale, stringent requirements are put on X-ray optics manufacturing and metrology. As a result, these optics often suffer from aberrations. Until now, X-ray optics were mainly characterized by their focal spot size and efficiency. How- ever, both measures provide only insufficient information about optics quality. Here, we present a quantitative analysis of residual aberrations in current beryllium compound refractive lenses using ptychography followed by a determination of the wavefront error and subsequent Zernike polynomial decomposition. Known from visible light optics, we show that these measures can provide an adequate tool to determine and compare the quality of various X-ray optics.

Paper Details

Date Published: 15 September 2016
PDF: 8 pages
Proc. SPIE 9963, Advances in X-Ray/EUV Optics and Components XI, 99630P (15 September 2016); doi: 10.1117/12.2237646
Show Author Affiliations
Frank Seiboth, Deutsches Elektronen-Synchrotron DESY (Germany)
SLAC National Accelerator Lab. (United States)
Maik Kahnt, Deutsches Elektronen-Synchrotron DESY (Germany)
Maria Scholz, Deutsches Elektronen-Synchrotron DESY (Germany)
Martin Seyrich, Deutsches Elektronen-Synchrotron DESY (Germany)
Felix Wittwer, Deutsches Elektronen-Synchrotron DESY (Germany)
Jan Garrevoet, Deutsches Elektronen-Synchrotron DESY (Germany)
Gerald Falkenberg, Deutsches Elektronen-Synchrotron DESY (Germany)
Andreas Schropp, Deutsches Elektronen-Synchrotron DESY (Germany)
Christian G. Schroer, Deutsches Elektronen-Synchrotron DESY (Germany)
Univ. Hamburg (Germany)


Published in SPIE Proceedings Vol. 9963:
Advances in X-Ray/EUV Optics and Components XI
Ali M. Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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