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Proceedings Paper

Design and simulation of a MEM pressure microgripper based on electrothermal microactuators
Author(s): Margarita Tecpoyotl-T.; Pedro Vargas Ch.; Svetlana Koshevaya; Ramón Cabello-R.; Alejandra Ocampo-D.; J. Gerardo Vera-D.
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Paper Abstract

Design and simulation of a novel pressure microgripper based on Microelectromechanical, MEM technology, and composed by several electrothermal microactuators were carried out in order to increment the displacement and the cutoff force. The implementation of an element of press or gripping in the arrow of chevron actuator was implemented to supply stability in the manipulation of micro-objects. Each device of the microgripper and its fundamental equations will be described. The fundamental parameters to understand the operation and behaviour of the device are analyzed through sweeps of temperature (from 30 °C up to 100 °C) and voltage (from 0.25 V up to 5 V), showing the feasibility to operate the microgripper with electrical or thermal feeding. The design and simulation were development with Finite Element Method (FEM) in Ansys-Workbench 16.0. In this work, the fundamental parameters were calculated in Ansys-Workbench. It is shown, that structural modifications have great impact in the displacement and the cut-off force of the microgripper.

Paper Details

Date Published: 23 September 2016
PDF: 13 pages
Proc. SPIE 9936, Thin Films for Solar and Energy Technology VIII, 99360I (23 September 2016); doi: 10.1117/12.2237533
Show Author Affiliations
Margarita Tecpoyotl-T., Ctr. de Investigaciones en Ingeniería y Ciencias Aplicadas (Mexico)
Pedro Vargas Ch., Ctr. de Investigaciones en Ingeniería y Ciencias Aplicadas (Mexico)
Svetlana Koshevaya, Ctr. de Investigaciones en Ingeniería y Ciencias Aplicadas (Mexico)
Ramón Cabello-R., Ctr. de Investigaciones en Ingeniería y Ciencias Aplicadas (Mexico)
Alejandra Ocampo-D., Ctr. de Investigaciones en Ingeniería y Ciencias Aplicadas (Mexico)
J. Gerardo Vera-D., Ctr. de Investigaciones en Ingeniería y Ciencias Aplicadas (Mexico)


Published in SPIE Proceedings Vol. 9936:
Thin Films for Solar and Energy Technology VIII
Michael J. Heben; Mowafak M. Al-Jassim, Editor(s)

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