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A non-linear piezoelectric actuator calibration using N-dimensional Lissajous figure
Author(s): A. Albertazzi; M. R. Viotti; C. L. N. Veiga; A. V. Fantin
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Paper Abstract

Piezoelectric translators (PZTs) are very often used as phase shifters in interferometry. However, they typically present a non-linear behavior and strong hysteresis. The use of an additional resistive or capacitive sensor make possible to linearize the response of the PZT by feedback control. This approach works well, but makes the device more complex and expensive. A less expensive approach uses a non-linear calibration. In this paper, the authors used data from at least five interferograms to form N-dimensional Lissajous figures to establish the actual relationship between the applied voltages and the resulting phase shifts [1]. N-dimensional Lissajous figures are formed when N sinusoidal signals are combined in an N-dimensional space, where one signal is assigned to each axis. It can be verified that the resulting Ndimensional ellipsis lays in a 2D plane. By fitting an ellipsis equation to the resulting 2D ellipsis it is possible to accurately compute the resulting phase value for each interferogram. In this paper, the relationship between the resulting phase shift and the applied voltage is simultaneously established for a set of 12 increments by a fourth degree polynomial. The results in speckle interferometry show that, after two or three interactions, the calibration error is usually smaller than 1°.

Paper Details

Date Published: 28 August 2016
PDF: 11 pages
Proc. SPIE 9960, Interferometry XVIII, 99600L (28 August 2016); doi: 10.1117/12.2237367
Show Author Affiliations
A. Albertazzi, Univ. Federal de Santa Catarina (Brazil)
M. R. Viotti, Univ. Federal de Santa Catarina (Brazil)
C. L. N. Veiga, Univ. Federal de Santa Catarina (Brazil)
A. V. Fantin, Univ. Federal de Santa Catarina (Brazil)


Published in SPIE Proceedings Vol. 9960:
Interferometry XVIII
Katherine Creath; Jan Burke; Armando Albertazzi Gonçalves, Editor(s)

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