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Proceedings Paper

Electron-rain-assisted deposition of optical thin films
Author(s): Jiu Lin Zhou; Zi Ma; Qian Ru Liu
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Paper Abstract

A hollow cathode electron/ion source with permanent-magnet-field was introduced to assist depositing oxidemetal optical coatings. The refractive index ,absoption and scatter of as -deposited layers arediscussed. It wasfound that the optical loss (absoption and scatter) decreased under proper depositing conditions. The optirnumevaporating parameters were obtained through orthogonal experiments.

Paper Details

Date Published: 1 December 1990
PDF: 4 pages
Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22373
Show Author Affiliations
Jiu Lin Zhou, South-West Technical Physics Institute (China)
Zi Ma, South-West Technical Physics Institute (China)
Qian Ru Liu, South-West Technical Physics Institute (China)

Published in SPIE Proceedings Vol. 1323:
Optical Thin Films III: New Developments
Richard Ian Seddon, Editor(s)

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