Share Email Print

Proceedings Paper

Fiber temperature sensor utilizing a thermomechanical MEMS detector
Author(s): H. Ozan Çirkinoğlu; Habib Bilgin; Fehmi Çivitci; Hamdi Torun; Onur Ferhanoğlu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

Paper Details

Date Published: 7 September 2016
PDF: 6 pages
Proc. SPIE 9958, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X, 995813 (7 September 2016); doi: 10.1117/12.2237134
Show Author Affiliations
H. Ozan Çirkinoğlu, Istanbul Technical Univ. (Turkey)
Habib Bilgin, Boğaziçi Univ. (Turkey)
Fehmi Çivitci, Istanbul Technical Univ. (Turkey)
Hamdi Torun, Boğaziçi Univ. (Turkey)
Onur Ferhanoğlu, Istanbul Technical Univ. (Turkey)

Published in SPIE Proceedings Vol. 9958:
Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X
Shizhuo Yin; Ruyan Guo, Editor(s)

© SPIE. Terms of Use
Back to Top