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Glancing angle deposition for production of optical components in UV region
Author(s): Tomas Tolenis; Lina Grinevičiūtė; Rytis Buzelis; Laurynas Petronis; Ramutis Drazdys
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Paper Abstract

Technological developments in laser technology require advancements in optical components. Such demand is particularly important in UV spectral region. Antireflection coatings (AR) and waveplates as a widely used optical elements were produced based on glancing angle deposition (GLAD) method. Superior optical performance was measured for AR thin films. Broadband and broad-angle antireflection coatings were manufactured by using multilayer system when changing the refractive index profile by varying the porosity of material. SiO2, Al2O3 and LaF3 materials were used for formation of waveplates for UV region. An investigation of optical and resistant performance were conducted. All materials showed optical losses at the wavelength of 355 nm. Possible technological solutions are presented and investigated.

Paper Details

Date Published: 26 September 2016
PDF: 4 pages
Proc. SPIE 9929, Nanostructured Thin Films IX, 99290D (26 September 2016); doi: 10.1117/12.2237120
Show Author Affiliations
Tomas Tolenis, Ctr. for Physical Sciences and Technology (Lithuania)
Lina Grinevičiūtė, Ctr. for Physical Sciences and Technology (Lithuania)
Rytis Buzelis, Ctr. for Physical Sciences and Technology (Lithuania)
Laurynas Petronis, Ctr. for Physical Sciences and Technology (Lithuania)
Ramutis Drazdys, Ctr. for Physical Sciences and Technology (Lithuania)

Published in SPIE Proceedings Vol. 9929:
Nanostructured Thin Films IX
Akhlesh Lakhtakia; Tom G. Mackay; Motofumi Suzuki, Editor(s)

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