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Proceedings Paper

Ion currents and energies in reactive low-voltage ion plating: preliminary results
Author(s): Johannes P. Edlinger; Hans K. Pulker
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Paper Abstract

Reactive Low-Voltage Ion Plating (RLVIP) is a plasma-assisted evaporation process that produces anorganic oxide- and nitride films with a closed microstructure. in order to better understand the process and the resulting film properties a BALZERS PPM 400 Plasmamonitor, a combination of a quadrupole mass filter and an energy selective ion optics, has been used to study the relative abundancies and energy distributions of the ions impinging on the growing film in the RLVIP process. The device is discussed and preliminary results are presented: The plasma is anisotropic. Surprisingly it contains ions with higher energies than expected from the self-bias potential.

Paper Details

Date Published: 1 December 1990
PDF: 10 pages
Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22369
Show Author Affiliations
Johannes P. Edlinger, Balzers AG (Liechtenstein)
Hans K. Pulker, Balzers AG (Liechtenstein)

Published in SPIE Proceedings Vol. 1323:
Optical Thin Films III: New Developments
Richard Ian Seddon, Editor(s)

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