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Proceedings Paper

Subaperture stitching interferometry with reduced reference errors for ultrasmooth surfaces
Author(s): Xudong Xu; Qiushi Huang; Zhengxiang Shen; Zhanshan Wang
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Paper Abstract

Low-roughness ultrasmooth surfaces are under increasing demand in short-wavelength optical systems. Substitching interferometry has been used to measure the profiles of surfaces used in X-ray beam. To validate the stitching accuracy of our optical profiler, a comparison of stitching surfaces using a 10X objective and those directly measured using a 2.5X objective is performed with a resolution of 1 μm. By studying the multiple measurements and defocussing errors, the reference surface error is measured in various regions of a standard flat surface with random positions and rotation angles. In the final experiment, 25 subapertures measured using a 10X objective with reduced reference surface error are stitched to a 2.54 X 1.90 mm area. The comparison is between the stitching and the same area measured directly using the 2.5X objective, and the results show that a root-mean-square accuracy of <0.2 nm can be achieved.

Paper Details

Date Published: 8 September 2016
PDF: 8 pages
Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996208 (8 September 2016); doi: 10.1117/12.2236629
Show Author Affiliations
Xudong Xu, Tongji Univ. (China)
Qiushi Huang, Tongji Univ. (China)
Zhengxiang Shen, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)


Published in SPIE Proceedings Vol. 9962:
Advances in Metrology for X-Ray and EUV Optics VI
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)

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