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Proceedings Paper

Different approaches for resolution enhancement in optical nano metrology
Author(s): Wolfgang Osten; Karsten Frenner; Maria Laura Gödecke
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Proc. SPIE 9926, UV and Higher Energy Photonics: From Materials to Applications, 99260L; doi: 10.1117/12.2236606
Show Author Affiliations
Wolfgang Osten, Univ. Stuttgart (Germany)
Karsten Frenner, Univ. Stuttgart (Germany)
Maria Laura Gödecke, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 9926:
UV and Higher Energy Photonics: From Materials to Applications
Gilles Lérondel; Satoshi Kawata; Yong-Hoon Cho, Editor(s)

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