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Proceedings Paper

On-axis reverse Hartmann test in aspheric optical surface test with the optical flat calibration
Author(s): Zhengzheng Xia; Mei Hui; Zhu Zhao; Ming Liu; Liquan Dong; Xiaohua Liu; Lingqin Kong; Yuejin Zhao
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Paper Abstract

The Reverse Hartmann test is developed rapidly, robustly, and accurately in measuring precision aspheric surface. The onaxis design provides better control of the astigmatism in the test. We use an on-axis Hartmann test in reverse to measure the aspheric optical mirrors. In the configuration, the LCD with a light pattern on the screen illuminates to the tested surface, and a 2μm-thick pellicle beam splitter is employed to obtain the coaxial light model. An optical flat with 1/20λ surface precision is used to calibrate the rays which pass through the external pinhole and image at the detector, and the data are processed to obtain the direction vectors of arbitrary reflected rays. The surface gradients are determined by the spatial equations of incident and reflected rays which have been calibrated. The shape of surface is finally reconstructed by Zernike polynomial fitting. The experiments include measuring a 76.2mm off-axis parabolic mirror and a 76.2mm spherical mirror. The experimental results show coaxial reverse Hartmann test system may allow for accurate measurements with uncertainties in the micrometer range using cost-effective equipments.

Paper Details

Date Published: 5 October 2016
PDF: 7 pages
Proc. SPIE 9961, Reflection, Scattering, and Diffraction from Surfaces V, 99610T (5 October 2016); doi: 10.1117/12.2236120
Show Author Affiliations
Zhengzheng Xia, Beijing Institute of Technology (China)
Mei Hui, Beijing Institute of Technology (China)
Zhu Zhao, Beijing Institute of Technology (China)
Ming Liu, Beijing Institute of Technology (China)
Liquan Dong, Beijing Institute of Technology (China)
Xiaohua Liu, Beijing Institute of Technology (China)
Lingqin Kong, Beijing Institute of Technology (China)
Yuejin Zhao, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 9961:
Reflection, Scattering, and Diffraction from Surfaces V
Leonard M. Hanssen, Editor(s)

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