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Proceedings Paper

Effect of 532nm laser thermal annealing on formation of p+/n ultra shallow junction with molecular monolayer doping
Author(s): Chul Jin Park; Sang Min Jung; Hong Sik Jeong; Moo Whan Shin
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Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 992719; doi: 10.1117/12.2235991
Show Author Affiliations
Chul Jin Park, Yonsei Univ. (Korea, Republic of)
Sang Min Jung, Yonsei Univ. (Korea, Republic of)
Hong Sik Jeong, Yonsei Univ. (Korea, Republic of)
Moo Whan Shin, Yonsei Univ. (Korea, Republic of)
Yonsei Institute of Convergence Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 9927:
Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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