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Proceedings Paper

Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition
Author(s): Jie Liu; Xinbin Cheng; Jie Chen; Xingrui Wang; Xiao Deng; Yan Ma; Tongbao Li
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Paper Abstract

Nanometric lateral standards are essential to nanometrology. Using laser-focused atomic deposition, a one-dimensional (1D) grating has been manufactured. The pitch of the grating is 212.8 nm, which can be traced to the laser wavelength that is accurately locked to the 52Cr atomic resonance transition 7S37P40. In this paper, the uniformity rather than the pitch accuracy of the 1D grating was evaluated using atomic force microscope (AFM). Based on the center-of-gravity method, the average pitch and the nonuniformity of the grating pitch were calculated. The results show that the average pitch of the grating is 213.2 nm which deviates from the design pitch due to the calibration of AFM, and the nonuniformity of the grating is 0.1 nm. The results preliminarily prove that 1D grating fabricated by laser-focused atomic deposition has good uniformity, and has great potential to become nanometric reference material for AFM and scanning electron microscope (SEM) calibration.

Paper Details

Date Published: 15 September 2016
PDF: 6 pages
Proc. SPIE 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, 99270K (15 September 2016); doi: 10.1117/12.2235906
Show Author Affiliations
Jie Liu, Tongji Univ. (China)
Xinbin Cheng, Tongji Univ. (China)
Jie Chen, Tongji Univ. (China)
Xingrui Wang, Tongji Univ. (China)
Xiao Deng, Tongji Univ. (China)
Yan Ma, Tongji Univ. (China)
Tongbao Li, Tongji Univ. (China)


Published in SPIE Proceedings Vol. 9927:
Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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