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Proceedings Paper

Multilayer coating of XTP telescope mirrors
Author(s): Li Jiang; Runze Qi; Yang Yang; Qiushi Huang; Zhong Zhang; Yuhong Bai; Zhanshan Wang
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Paper Abstract

We present the coating of depth-graded W/Si multilayers on the thin glass substrates for telescopes in X-ray timing and polarization mission. The multilayer consists of several hundred bilayers in an optimized graded power law design with stringent requirements on uniformity and interface width. We introduce the details of the planar magnetron sputtering facility including the optimization of the deposition process. Results are presented on the uniformity, interface width, reflectivity and the fabrication of a 200-bilayers depth graded multilayer working at hard X-ray energies.

Paper Details

Date Published: 18 July 2016
PDF: 6 pages
Proc. SPIE 9905, Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray, 99056Q (18 July 2016); doi: 10.1117/12.2233729
Show Author Affiliations
Li Jiang, Tongji Univ. (China)
Runze Qi, Tongji Univ. (China)
Yang Yang, Tongji Univ. (China)
Qiushi Huang, Tongji Univ. (China)
Zhong Zhang, Tongji Univ. (China)
Yuhong Bai, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zhanshan Wang, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 9905:
Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray
Jan-Willem A. den Herder; Tadayuki Takahashi; Marshall Bautz, Editor(s)

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