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Proceedings Paper

Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA
Author(s): P. Khosropanah; T. Suzuki; M. L. Ridder; R. A. Hijmering; H. Akamatsu; L. Gottardi; J. van der Kuur; J. R. Gao; B. D. Jackson
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Paper Abstract

SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.

Paper Details

Date Published: 19 July 2016
PDF: 5 pages
Proc. SPIE 9914, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII, 99140B (19 July 2016); doi: 10.1117/12.2233472
Show Author Affiliations
P. Khosropanah, SRON Netherlands Institute for Space Research (Netherlands)
T. Suzuki, Nagoya Univ. (Japan)
M. L. Ridder, SRON Netherlands Institute for Space Research (Netherlands)
R. A. Hijmering, SRON Netherlands Institute for Space Research (Netherlands)
H. Akamatsu, SRON Netherlands Institute for Space Research (Netherlands)
L. Gottardi, SRON Netherlands Institute for Space Research (Netherlands)
J. van der Kuur, SRON Netherlands Institute for Space Research (Netherlands)
J. R. Gao, SRON Netherlands Institute for Space Research (Netherlands)
Delft Univ. of Technology (Netherlands)
B. D. Jackson, SRON Netherlands Institute for Space Research (Netherlands)


Published in SPIE Proceedings Vol. 9914:
Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII
Wayne S. Holland; Jonas Zmuidzinas, Editor(s)

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