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Proceedings Paper

Large arrays of dual-polarized multichroic TES detectors for CMB measurements with the SPT-3G receiver
Author(s): Chrystian M. Posada; Peter A. R. Ade; Adam J. Anderson; Jessica Avva; Zeeshan Ahmed; Kam S. Arnold; Jason Austermann; Amy N. Bender; Bradford A. Benson; Lindsey Bleem; Karen Byrum; John E. Carlstrom; Faustin W. Carter; Clarence Chang; Hsiao-Mei Cho; Ari Cukierman; David A. Czaplewski; Junjia Ding; Ralu N. S. Divan; Tijmen de Haan; Matt Dobbs; Daniel Dutcher; Wenderline Everett; Renae N. Gannon; Robert J. Guyser; Nils W. Halverson; Nicholas L. Harrington; Kaori Hattori; Jason W. Henning; Gene C. Hilton; William L. Holzapfel; Nicholas Huang; Kent D. Irwin; Oliver Jeong; Trupti Khaire; Milo Korman; Donna L. Kubik; Chao-Lin Kuo; Adrian T. Lee; Erik M. Leitch; Sergi Lendinez Escudero; Stephan S. Meyer; Christina S. Miller; Joshua Montgomery; Andrew Nadolski; Tyler J. Natoli; Hogan Nguyen; Valentyn Novosad; Stephen Padin; Zhaodi Pan; John E. Pearson; Alexandra Rahlin; Christian L. Reichardt; John E. Ruhl; Benjamin Saliwanchik; Ian Shirley; James T. Sayre; Jamil A. Shariff; Erik D. Shirokoff; Liliana Stan; Antony A. Stark; Joshua Sobrin; Kyle Story; Aritoki Suzuki; Qing Yang Tang; Ritoban Basu Thakur; Keith L. Thompson; Carole E. Tucker; Keith Vanderlinde; Joaquin D. Vieira; Gensheng Wang; Nathan Whitehorn; Volodymyr Yefremenko; Ki Won Yoon
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Paper Abstract

Detectors for cosmic microwave background (CMB) experiments are now essentially background limited, so a straightforward alternative to improve sensitivity is to increase the number of detectors. Large arrays of multichroic pixels constitute an economical approach to increasing the number of detectors within a given focal plane area. Here, we present the fabrication of large arrays of dual-polarized multichroic transition-edge-sensor (TES) bolometers for the South Pole Telescope third-generation CMB receiver (SPT-3G). The complete SPT-3G receiver will have 2690 pixels, each with six detectors, allowing for individual measurement of three spectral bands (centered at 95 GHz, 150 GHz and 220 GHz) in two orthogonal polarizations. In total, the SPT-3G focal plane will have 16140 detectors. Each pixel is comprised of a broad-band sinuous antenna coupled to a niobium microstrip transmission line. In-line filters are used to define the different band-passes before the millimeter-wavelength signal is fed to the respective Ti/Au TES sensors. Detectors are read out using a 64x frequency domain multiplexing (fMux) scheme. The microfabrication of the SPT-3G detector arrays involves a total of 18 processes, including 13 lithography steps. Together with the fabrication process, the effect of processing on the Ti/Au TES’s Tc is discussed. In addition, detectors fabricated with Ti/Au TES films with Tc between 400 mK 560 mK are presented and their thermal characteristics are evaluated. Optical characterization of the arrays is presented as well, indicating that the response of the detectors is in good agreement with the design values for all three spectral bands (95 GHz, 150 GHz, and 220 GHz). The measured optical efficiency of the detectors is between 0.3 and 0.8. Results discussed here are extracted from a batch of research of development wafers used to develop the baseline process for the fabrication of the arrays of detectors to be deployed with the SPT-3G receiver. Results from these research and development wafers have been incorporated into the fabrication process to get the baseline fabrication process presented here. SPT-3G is scheduled to deploy to the South Pole Telescope in late 2016.

Paper Details

Date Published: 19 July 2016
PDF: 11 pages
Proc. SPIE 9914, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII, 991417 (19 July 2016); doi: 10.1117/12.2232912
Show Author Affiliations
Chrystian M. Posada, Argonne National Lab. (United States)
Peter A. R. Ade, Cardiff Univ. (United Kingdom)
Adam J. Anderson, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Fermi National Accelerator Lab. (United States)
Jessica Avva, Univ. of California, Berkeley (United States)
Zeeshan Ahmed, Kavli Institute for Particle Astrophysics & Cosmology (United States)
Stanford Univ. (United States)
SLAC National Accelerator Lab. (United States)
Kam S. Arnold, Univ. of California, San Diego (United States)
Jason Austermann, Univ. of Colorado at Boulder (United States)
NIST Quantum Devices Group (United States)
Amy N. Bender, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Argonne National Lab. (United States)
Bradford A. Benson, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Fermi National Accelerator Lab. (United States)
Lindsey Bleem, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Argonne National Lab. (United States)
Karen Byrum, Argonne National Lab. (United States)
John E. Carlstrom, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Argonne National Lab. (United States)
Faustin W. Carter, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Argonne National Lab. (United States)
Clarence Chang, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Argonne National Lab. (United States)
Hsiao-Mei Cho, SLAC National Accelerator Lab. (United States)
Ari Cukierman, Univ. of California, Berkeley (United States)
David A. Czaplewski, Argonne National Lab. (United States)
Junjia Ding, Argonne National Lab. (United States)
Ralu N. S. Divan, Argonne National Lab. (United States)
Tijmen de Haan, Univ. of California, Berkeley (United States)
Matt Dobbs, McGill Univ. (Canada)
Canadian Institute for Advanced Research (Canada)
Daniel Dutcher, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Wenderline Everett, Univ. of Colorado at Boulder (United States)
Renae N. Gannon, Argonne National Lab. (United States)
Robert J. Guyser, Univ. of Illinois at Urbana-Champaign (United States)
Nils W. Halverson, Univ. of Colorado at Boulder (United States)
Nicholas L. Harrington, Univ. of California, Berkeley (United States)
Kaori Hattori, High Energy Accelerator Research Organization, KEK (Japan)
Jason W. Henning, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Gene C. Hilton, NIST Quantum Devices Group (United States)
William L. Holzapfel, Univ. of California, Berkeley (United States)
Nicholas Huang, Univ. of California, Berkeley (United States)
Kent D. Irwin, Kavli Institute for Particle Astrophysics & Cosmology (United States)
Stanford Univ. (United States)
SLAC National Accelerator Lab. (United States)
Oliver Jeong, Univ. of California, Berkeley (United States)
Trupti Khaire, Argonne National Lab. (United States)
Milo Korman, Case Western Reserve Univ. (United States)
Donna L. Kubik, Fermi National Accelerator Lab. (United States)
Chao-Lin Kuo, Kavli Institute for Cosmological Physics (United States)
Stanford Univ. (United States)
SLAC National Accelerator Lab. (United States)
Adrian T. Lee, Univ. of California, Berkeley (United States)
Lawrence Berkeley National Lab. (United States)
Erik M. Leitch, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Sergi Lendinez Escudero, Argonne National Lab. (United States)
Stephan S. Meyer, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Christina S. Miller, Argonne National Lab. (United States)
Joshua Montgomery, McGill Univ. (Canada)
Andrew Nadolski, Univ. of Illinois at Urbana-Champaign (United States)
Tyler J. Natoli, Univ. of Toronto (Canada)
Hogan Nguyen, Univ. of Colorado (United States)
Valentyn Novosad, Argonne National Lab. (United States)
Stephen Padin, Kavli Institute for Cosmological Physics (United States)
Univ. of Colorado at Boulder (United States)
Zhaodi Pan, Kavli Institute for Cosmological Physics (United States)
Univ. of Colorado at Boulder (United States)
John E. Pearson, Argonne National Lab. (United States)
Alexandra Rahlin, Fermi National Accelerator Lab. (United States)
Christian L. Reichardt, The Univ. of Melbourne (Australia)
John E. Ruhl, Case Western Reserve Univ. (United States)
Benjamin Saliwanchik, Case Western Reserve Univ. (United States)
Ian Shirley, Univ. of California, Berkeley (United States)
James T. Sayre, Univ. of Colorado at Boulder (United States)
Jamil A. Shariff, Case Western Reserve Univ. (United States)
Erik D. Shirokoff, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Liliana Stan, Argonne National Lab. (United States)
Antony A. Stark, Harvard-Smithsonian Ctr. for Astrophysics (United States)
Joshua Sobrin, The Univ. of Chicago (United States)
Kyle Story, Kavli Institute for Cosmological Physics (United States)
The Univ. of Chicago (United States)
Aritoki Suzuki, Univ. of California, Berkeley (United States)
Qing Yang Tang, The Univ. of Chicago (United States)
Ritoban Basu Thakur, Kavli Institute for Cosmological Physics (United States)
Keith L. Thompson, Kavli Institute for Particle Astrophysics & Cosmology (United States)
Stanford Univ. (United States)
SLAC National Accelerator Lab. (United States)
Carole E. Tucker, Cardiff Univ. (United Kingdom)
Keith Vanderlinde, Univ. of Toronto (Canada)
Joaquin D. Vieira, Univ. of Illinois at Urbana-Champaign (United States)
Gensheng Wang, Argonne National Lab. (United States)
Nathan Whitehorn, Univ. of California, Berkeley (United States)
Volodymyr Yefremenko, Argonne National Lab. (United States)
Ki Won Yoon, Kavli Institute for Particle Astrophysics & Cosmology (United States)
Stanford Univ. (United States)
SLAC National Accelerator Lab. (United States)


Published in SPIE Proceedings Vol. 9914:
Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII
Wayne S. Holland; Jonas Zmuidzinas, Editor(s)

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