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Proceedings Paper

Modeling of microelectromechanical systems deformable mirror diffraction grating
Author(s): Dan Sirbu; Eugene Pluzhnik; Ruslan Belikov
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Paper Abstract

Model-based wavefront control methods such as electric field conjugation require accurate optical propagation models to create high-contrast regions in the focal plane using deformable mirrors (DMs). Recently, it has been shown that it is possible to exceed the controllable outer-working angle imposed by the Nyquist limit based on the number of actuators by utilizing a diffraction grating. The print-through pattern on MEMS-based DMs formed during the fabrication process creates both an amplitude and a phase diffraction grating that can be used to enable Super-Nyquist wavefront control. Using interferometric measurements of a DM-actuator, we develop a DM-diffraction grating model. We compare the total energy enclosed in the first diffraction order due to the phase, amplitude, and combined phase-amplitude gratings with laboratory measurements.

Paper Details

Date Published: 29 July 2016
PDF: 10 pages
Proc. SPIE 9904, Space Telescopes and Instrumentation 2016: Optical, Infrared, and Millimeter Wave, 990466 (29 July 2016); doi: 10.1117/12.2232335
Show Author Affiliations
Dan Sirbu, NASA Ames Research Ctr. (United States)
Eugene Pluzhnik, NASA Ames Research Ctr. (United States)
Ruslan Belikov, NASA Ames Research Ctr. (United States)


Published in SPIE Proceedings Vol. 9904:
Space Telescopes and Instrumentation 2016: Optical, Infrared, and Millimeter Wave
Howard A. MacEwen; Giovanni G. Fazio; Makenzie Lystrup; Natalie Batalha; Nicholas Siegler; Edward C. Tong, Editor(s)

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