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Proceedings Paper

Laser-assisted etching of ferroelectric ceramics for the reticulation of IR detector arrays
Author(s): Michael A. Todd; Rex Watton
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Paper Abstract

Focal plane arrays using ferroelectric ceramics have shown considerable success for ambient temperature IR imaging. To realise their full potential, however, the arrays must be reticulated, ie. the individual detector elements must be physically separated. In the research reported here, the use of focused argon-ion laser radiation to etch lead-compound ferroelectric ceramics in aqueous KOH is demonstrated. The experimental conditions required to laser-etch the desired structures for detector elements are discussed. Finally, the use of a reflective metal layer as an etch stop is assessed and laser-reticulated elements at 1 00 microns pitch are shown.

Paper Details

Date Published: 1 October 1990
PDF: 12 pages
Proc. SPIE 1320, Infrared Technology and Applications, (1 October 1990); doi: 10.1117/12.22316
Show Author Affiliations
Michael A. Todd, Royal Signals and Radar Establishment (United Kingdom)
Rex Watton, Royal Signals and Radar Establishment (United Kingdom)

Published in SPIE Proceedings Vol. 1320:
Infrared Technology and Applications

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