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Proceedings Paper

Systemic errors calibration in dynamic stitching interferometry
Author(s): Xin Wu; Te Qi; Yingjie Yu; Linna Zhang
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Paper Abstract

The systemic error is the main error sauce in sub-aperture stitching calculation. In this paper, a systemic error calibration method is proposed based on pseudo shearing. This method is suitable in dynamic stitching interferometry for large optical plane. The feasibility is vibrated by some simulations and experiments.

Paper Details

Date Published: 16 May 2016
PDF: 6 pages
Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900Z (16 May 2016); doi: 10.1117/12.2231397
Show Author Affiliations
Xin Wu, Shanghai Univ. (China)
Univ. of Huddersfield (United Kingdom)
Te Qi, Shanghai Univ. (China)
Yingjie Yu, Shanghai Univ. (China)
Linna Zhang, Zhengzhou Univ. (China)


Published in SPIE Proceedings Vol. 9890:
Optical Micro- and Nanometrology VI
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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