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Proceedings Paper

Design and simulation of non-resonant 1-DOF drive mode and anchored 2-DOF sense mode gyroscope for implementation using UV-LIGA process
Author(s): Payal Verma; Ram Gopal; M. A. Butt; Svetlana N. Khonina; Roman V. Skidanov
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Paper Abstract

This paper presents the design and simulation of a 3-DOF (degree-of-freedom) MEMS gyroscope structure with 1-DOF drive mode and anchored 2-DOF sense mode, based on UV-LIGA technology. The 3-DOF system has the drive resonance located in the flat zone between the two sense resonances. It is an inherently robust structure and offers a high sense frequency band width and high gain without much scaling down the mass on which the sensing comb fingers are attached and it is also immune to process imperfections and environmental conditions. The design is optimized to be compatible with the UV-LIGA process, having 9 μm thick nickel as structural layer. The electrostatic gap between the drive comb fingers is 4 μm and sense comb fingers gap are 4 μm/12 μm. The damping effect is considered by assuming the flexures and the proof mass suspended about 6 μm over the substrate. Accordingly, mask is designed in L-Edit software.

Paper Details

Date Published: 26 March 2016
PDF: 8 pages
Proc. SPIE 9807, Optical Technologies for Telecommunications 2015, 98070D (26 March 2016); doi: 10.1117/12.2231372
Show Author Affiliations
Payal Verma, Samara State Aerospace Univ. (Russian Federation)
Central Electronics Engineering Research Institute (India)
Ram Gopal, Central Electronics Engineering Research Institute (India)
M. A. Butt, Samara State Aerospace Univ. (Russian Federation)
Svetlana N. Khonina, Samara State Aerospace Univ. (Russian Federation)
Image Processing Systems Institute (Russian Federation)
Roman V. Skidanov, Samara State Aerospace Univ. (Russian Federation)
Image Processing Systems Institute (Russian Federation)


Published in SPIE Proceedings Vol. 9807:
Optical Technologies for Telecommunications 2015
Vladimir A. Andreev; Anton V. Bourdine; Vladimir A. Burdin; Oleg G. Morozov; Albert H. Sultanov, Editor(s)

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