Share Email Print
cover

Proceedings Paper

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry
Author(s): Sylwester Bargiel; Justine Lullin; Patrice Lemoal; Stéphane Perrin; Nicolas Passilly; Jorge Albero; Luc Froehly; Franck Lardet-Vieudrin; Christophe Gorecki
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, we present construction, fabrication and characterization of an electrostatic MOEMS vertical microscanner for generation of an optical phase shift in array-type interferometric microsystems. The microscanner employs asymmetric comb-drives for a vertical displacement of a large 4x4 array of reference micromirrors and for in-situ position sensing. The device is designed to be fully compatible with Mirau configuration and with vertical integration strategy. This enables further integration of the device within an "active" multi-channel Mirau micro-interferometer and implementation of the phase shifting interferometry (PSI) technique for imaging applications. The combination of micro-interferometer and PSI is particularly interesting in the swept-source optical coherence tomography, since it allows not only strong size reduction of a system but also improvement of its performance (sensitivity, removal of the image artefacts). The technology of device is based on double-side DRIE of SOI wafer and vapor HF releasing of the suspended platform. In the static mode, the device provides vertical displacement of micromirrors up to 2.8μm (0 - 40V), whereas at resonance (fo=500 Hz), it reaches 0.7 μm for only 1VDC+1VAC. In both operation modes, the measured displacement is much more than required for PSI implementation (352nm peak-to-peak). The presented device is a key component of array-type Mirau micro-interferometer that enables the construction of portable, low-cost interferometric systems, e.g. for in vivo medical diagnostics.

Paper Details

Date Published: 26 April 2016
PDF: 8 pages
Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900D (26 April 2016); doi: 10.1117/12.2230487
Show Author Affiliations
Sylwester Bargiel, FEMTO-ST, CNRS (France)
Justine Lullin, FEMTO-ST, CNRS (France)
Patrice Lemoal, FEMTO-ST, CNRS (France)
Stéphane Perrin, FEMTO-ST, CNRS (France)
Nicolas Passilly, FEMTO-ST, CNRS (France)
Jorge Albero, FEMTO-ST, CNRS (France)
Luc Froehly, FEMTO-ST, CNRS (France)
Franck Lardet-Vieudrin, FEMTO-ST, CNRS (France)
Christophe Gorecki, FEMTO-ST, CNRS (France)


Published in SPIE Proceedings Vol. 9890:
Optical Micro- and Nanometrology VI
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

© SPIE. Terms of Use
Back to Top