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Proceedings Paper

Study on monolithically integration miniaturized spectral imager by Fabry-Perot with Bragg stack
Author(s): Shuyang Liu; Tao Zhou; Xiaodong Jia; Hushan Cui; Chengjun Huang
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Paper Abstract

To break the limitation of the traditional spectral analysis system in low speed, high cost and huge size, this paper presents a CMOS-based monolithically miniaturized spectral system whose core component is the spectral imager. The idea of the spectral imager is to fabricate a spectral filter on top of the traditional CMOS imager. This paper designed a FP thin film filter consisted of Bragg stack as a mirror while both the material and the process is compatible with the CMOS imager fabrication. By the simulation, the filter is able to achieve a 2nm spectral resolution, which is a proof for the feasibility of the miniaturized spectral analysis system.

Paper Details

Date Published: 26 January 2016
PDF: 6 pages
Proc. SPIE 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 979611 (26 January 2016); doi: 10.1117/12.2229566
Show Author Affiliations
Shuyang Liu, Tianjin Jinhang Research Institute of Technical Physics (China)
Tao Zhou, Tianjin Jinhang Research Institute of Technical Physics (China)
Xiaodong Jia, Tianjin Jinhang Research Institute of Technical Physics (China)
Hushan Cui, Institute of Microelectronics (China)
Chengjun Huang, Institute of Microelectronics (China)


Published in SPIE Proceedings Vol. 9796:
Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015
Weimin Bao; Yueguang Lv, Editor(s)

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