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Proceedings Paper

Design and manufacture of a bandpass filter with high transmittance and steep edge on both sides
Author(s): Ruisheng Wang; Shaobo Lü; Xiaojun Yin; Shuaifeng Zhao; Yan Sun
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Paper Abstract

By using Nb2O5 and SiO2 as the coating material, a 152 layers (12 cavities) bandpass film stack with steep edge on both sides was designed. Multiple thickness control methods, including direct optical monitoring control and time control were used in coating strategy. To confirm the feasibility of this coating strategy, a process simulation was performed using Simulator software, and the simulation result indicated that relative thickness errors for all layers were less than ±0.1%. A bandpass filter with this film stack on one side was manufactured by using a plasma assisted reactive magnetic sputtering coating machine. The measuring result shows that the peak transmittance of the filter (without AR on backside) is up to 95.4%, and the steepness of both blocking slope are less than λ/100.

Paper Details

Date Published: 26 January 2016
PDF: 6 pages
Proc. SPIE 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 979610 (26 January 2016); doi: 10.1117/12.2229556
Show Author Affiliations
Ruisheng Wang, Shenyang Academy of Instrumentation Science Co., Ltd. (China)
Shaobo Lü, Shenyang Academy of Instrumentation Science Co., Ltd. (China)
Xiaojun Yin, Shenyang Academy of Instrumentation Science Co., Ltd. (China)
Shuaifeng Zhao, Shenyang Academy of Instrumentation Science Co., Ltd. (China)
Yan Sun, Shenyang Academy of Instrumentation Science Co., Ltd. (China)


Published in SPIE Proceedings Vol. 9796:
Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015
Weimin Bao; Yueguang Lv, Editor(s)

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