Share Email Print
cover

Proceedings Paper

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Some of the critical limitations for widespread use in medical applications of optical devices, such as confocal or optical coherence tomography (OCT) systems, are related to their cost and large size. Indeed, although quite efficient systems are available on the market, e.g. in dermatology, they equip only a few hospitals and hence, are far from being used as an early detection tool, for instance in screening of patients for early detection of cancers. In this framework, the VIAMOS project aims at proposing a concept of miniaturized, batch-fabricated and lower-cost, OCT system dedicated to non-invasive skin inspection. In order to image a large skin area, the system is based on a full-field approach. Moreover, since it relies on micro-fabricated devices whose fields of view are limited, 16 small interferometers are arranged in a dense array to perform multi-channel simultaneous imaging. Gaps between each channel are then filled by scanning of the system followed by stitching. This approach allows imaging a large area without the need of large optics. It also avoids the use of very fast and often expensive laser sources, since instead of a single point detector, almost 250 thousands pixels are used simultaneously. The architecture is then based on an array of Mirau interferometers which are interesting for their vertical arrangement compatible with vertical assembly at the wafer-level. Each array is consequently a local part of a stack of seven wafers. This stack includes a glass lens doublet, an out-of-plane actuated micro-mirror for phase shifting, a spacer and a planar beam-splitter. Consequently, different materials, such as silicon and glass, are bonded together and well-aligned thanks to lithographic-based fabrication processes.

Paper Details

Date Published: 26 April 2016
PDF: 7 pages
Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900C (26 April 2016); doi: 10.1117/12.2229477
Show Author Affiliations
Nicolas Passilly, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Stéphane Perrin, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Justine Lullin, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Jorge Albero, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Sylwester Bargiel, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Luc Froehly, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Christophe Gorecki, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Johann Krauter, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)
Wei-Shan Wang, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
Maik Wiemer, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)


Published in SPIE Proceedings Vol. 9890:
Optical Micro- and Nanometrology VI
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

© SPIE. Terms of Use
Back to Top