Proceedings PaperGeneralized phase-shifting interferometry
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This paper describes a generalized phase shifting interferometiy where the reference phase instead of being set to predetermined values is directly evaluated at each time the interference fringe data are read. The evaluation of the phase shifted is achieved by introducing the FF1'' method for analyzing additional straight fringes on the interfering plane. The repeatability in the measurements of an optical surface is V500 when the generalized algorithm with 8 data acquisitions is used. 1.