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Proceedings Paper

Development and investigation of MOEMS type displacement-pressure sensor for biological information monitoring
Author(s): Vytautas Ostasevicius; Karolis Malinauskas; Giedrius Janusas; Arvydas Palevicius; Elingas Cekas
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Paper Abstract

The aim of this paper is to develop and investigate MOEMS displacement-pressure sensor for biological information monitoring. Developing computational periodical microstructure models using COMSOL Multiphysics modeling software for modal and shape analysis and implementation of these results for design MOEMS displacement-pressure sensor for biological information monitoring was performed. The micro manufacturing technology of periodical microstructure having good diffraction efficiency was proposed. Experimental setup for characterisation of optical properties of periodical microstructure used for design of displacement-pressure sensor was created. Pulsating human artery dynamic characteristics in this paper were analysed.

Paper Details

Date Published: 29 April 2016
PDF: 10 pages
Proc. SPIE 9899, Optical Sensing and Detection IV, 98992Q (29 April 2016); doi: 10.1117/12.2228792
Show Author Affiliations
Vytautas Ostasevicius, Kaunas Univ. of Technology (Lithuania)
Karolis Malinauskas, Kaunas Univ. of Technology (Lithuania)
Giedrius Janusas, Kaunas Univ. of Technology (Lithuania)
Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania)
Elingas Cekas, Kaunas Univ. of Technology (Lithuania)


Published in SPIE Proceedings Vol. 9899:
Optical Sensing and Detection IV
Francis Berghmans; Anna G. Mignani, Editor(s)

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