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Proceedings Paper

Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits
Author(s): Srinath Kalluri; Antao Chen; Vadim Chuyanov; Mehrdad Ziari; William H. Steier; Larry Raymond Dalton
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Paper Abstract

To demonstrate the feasibility of integrating polymer electro-optic devices on Si circuitry, we have vertically integrated a demonstration slab phase modulator on nonplanar VLSI circuitry. Optical loss measurements for waveguides fabricated on planarized circuits demonstrate that more practical devices like channel phase and Mach-Zehnder amplitude modulators can easily be integrated onto the circuits.

Paper Details

Date Published: 5 October 1995
PDF: 9 pages
Proc. SPIE 2527, Nonlinear Optical Properties of Organic Materials VIII, (5 October 1995); doi: 10.1117/12.222809
Show Author Affiliations
Srinath Kalluri, Univ. of Southern California (United States)
Antao Chen, Univ. of Southern California (United States)
Vadim Chuyanov, Univ. of Southern California (United States)
Mehrdad Ziari, Univ. of Southern California (United States)
William H. Steier, Univ. of Southern California (United States)
Larry Raymond Dalton, Univ. of Southern California (United States)


Published in SPIE Proceedings Vol. 2527:
Nonlinear Optical Properties of Organic Materials VIII
Gustaaf R. Moehlmann, Editor(s)

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