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Proceedings Paper

Subaperture method for aspheric surface metrology using curvature data
Author(s): SeongWon Lee; WooKyung Jeon; TaeJin Park; ByoungChang Kim; GeonHee Kim; SangWon Hyun; IJong Kim; Seunghyun Kim; ChangKyu Kim; HyungSuk Lee
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Paper Abstract

We present a profilometry for measuring aspheric surface, which determines the curvature from the sub-aperture topography along two orthogonal directions and then reconstructs the entire surface profile from the measured curvature data. The entire surface was divided into a number of sub-apertures with overlapping zones. Each sub-aperture was measured using white-light scanning interferometry to avoid any optical alignment error along an optical axis. Simulation studies are also presented based on the mathematical model. The proposed mathematical model was also experimentally tested on freeform surfaces using white-light scanning interferometry under deveolpment.

Paper Details

Date Published: 26 April 2016
PDF: 8 pages
Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989018 (26 April 2016); doi: 10.1117/12.2227961
Show Author Affiliations
SeongWon Lee, Kyungnam Univ. (Korea, Republic of)
WooKyung Jeon, Kyungnam Univ (Korea, Republic of)
TaeJin Park, Kyungnam Univ (Korea, Republic of)
ByoungChang Kim, Kyungnam Univ. (Korea, Republic of)
GeonHee Kim, Korea Basic Science Institute (Korea, Republic of)
SangWon Hyun, Korea Basic Science Institute (Korea, Republic of)
IJong Kim, Korea Basic Science Institute (Korea, Republic of)
Seunghyun Kim, Korea Basic Science Institute (Korea, Republic of)
ChangKyu Kim, NanoSystems Co., Ltd. (Korea, Republic of)
HyungSuk Lee, NanoSystems Co., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 9890:
Optical Micro- and Nanometrology VI
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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