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Proceedings Paper

Analysis of the effect of stress-induced waviness in airgap-based optical filters
Author(s): Mohammadamir Ghaderi; Ehsan Karimi Shahmarvandi; Ger de Graaf; Reinoud F. Wolffenbuttel
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Paper Abstract

The preliminary results of a study on the effect of the membrane deformation on the optical response of the distributed Bragg reflector, that is based on a stack of such membranes, are presented. The analysis is applied to airgap-based optical filters, which offer an enhanced refractive index contrast and hence are highly promising for optical MEMS devices. The available methods and materials in MEMS technology would make fabrication of such devices feasible, but the optical requirements impose strict geometrical implications on the membrane structure. Although (an overall) tensile stress in membrane is expected to result in a flat structure after the release, a stress gradient results in a deformed structure. A combined finite element and finite-difference time- domain method has been utilized in this work to study the effects of a stress gradient in a distributed Bragg reflector. The results on the effects of both a linear and a non-linear stress gradient are presented. It is shown that a non-linear stress profile results in twice the deformation and a further reduction of optical performance.

Paper Details

Date Published: 27 April 2016
PDF: 9 pages
Proc. SPIE 9889, Optical Modelling and Design IV, 98890A (27 April 2016); doi: 10.1117/12.2227937
Show Author Affiliations
Mohammadamir Ghaderi, Technische Univ. Delft (Netherlands)
Ehsan Karimi Shahmarvandi, Technische Univ. Delft (Netherlands)
Ger de Graaf, Technische Univ. Delft (Netherlands)
Reinoud F. Wolffenbuttel, Technische Univ. Delft (Netherlands)

Published in SPIE Proceedings Vol. 9889:
Optical Modelling and Design IV
Frank Wyrowski; John T. Sheridan; Youri Meuret, Editor(s)

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